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Solutions For Semiconductor Industry
For over 45 years Harrington has been providing top quality reliable products to the Semiconductor Industry.
Below are just a few examples of our Solutions for the Semiconductor Industry.

Dymatrix Process Solutions

Asahi/America’s Dymatrix specialty valves and control products were designed in close consultation with semiconductor industry leaders. Significant attention was paid to reducing the stress that can occur from valves in a Chemical Mechanical Planarization (CMP) slurry system.

Dymatrix Valves

The evolution of the Dymatrix products has expanded the application horizon. The inherent characteristics of quality craftsmanship, reliable components, flexible design options, and innovation are common to many industries. In addition to CMP processes, ultra-pure water and chemical applications benefit from the pioneering process solutions of Dymatrix Products.

Designed for high-purity media control

Gemu Valves

Type 67 manual high-purity diaphragm valve.
PFA straight through body, with TFM diaphragm. O.D. tubing flair end connections with PVDF nuts.
Features:
• Sizes 1/4” through 1-1/4”.
• Connections: Tube flare, or IPS spigot.
• Working pressure: maximum 90 psi.Gemu
• Working temperature: maximum 194°F.
• Materials: All wetted parts PFA, TFM (diaphragm), exterior actuator parts in PVDF.
• PFA union nuts are available.
• Space Saver model available.
• PVDF bodies available for 1/2” valves.

Kynar FM 4910 approved for semiconductor equipment

4910 sheet
Features:
• Sheet withstands high pressures and vacuums.
• Maintains mechanical properties; highly flexible and stress crack resistant over a wide range of temperatures.
• Stress relieved for close tolerance machining.
• Superior chemical resistance; highly resistant to oxidizing agents and halogens; nearly complete resistance to aliphatics, aromatics, alcohols, acids and chlorinated solvents; resistant to most acids, and bases.
• Non-flammable; rated UL 94V-O; self-extinguishing.
• Resistant to gamma radiation and ultraviolet light.
• Fabricate with standard hot gas welding or thermal fusion techniques.

FlareLINK PFA & PVDF Flare Tube Fittings

Flarelink
Features:
• Manufactured of 100% virgin resin known for low levels of particulation and surface finish.
• Ideal for ultra-pure water and semiconductor grade chemical applications.Flarelink fitting
• Fittings packaged in double polyethylene bags.
• Size range from 1/4" to 1" in all popular fitting configurations.
• Quick flaring tube makes assembly easy and convenient.
• All fittings are interchangeable with most popular PFA fittings.
• Not for use in applications that exceed 248°F for PVDF, or 350°F for PFA.
• PVDF nuts are standard on all fittings. PFA nuts are available.

PFA and FEP Tubing
PFA Tube
Features:
• Excellent chemical resistance.
• UV and weather resistant.
• Temperature range –348°F to 392°F FEP, to 500°F for PFA.
• Transparent at thin cross sections.
• Can be sterilized by several methods.
• Non-stick characteristics.
• FDA compliant; USP Class VI.
FlareLINK PVDF Multi-FLARE Fittings
MultiFlare
Features:
• Allows multiple tube connections from one fitting.
• Provides significant space and cost savings over multiple single-tube fittings.
• Tubes exit the Multi-FLARE fitting parallel from the
supply line.
 
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